Course Descriptions
MECH_ENG 451: Micromachining

Quarter Offered

Winter : MW 2:30-3:50 SYNCHRONOUS ; C. Sun




gearFundamental fabrication issues for microscale components used in MEMS/Nanotechnology. Understand and designing microfabrication processes based on photolithography and deposition/etching steps.

Who Takes It

Tech or other science major graduate students who plan their research based on micro/nano systems approaches. Those who want to gain broad knowledge about the new micro/nano technology trends.

What It's About

Micro Electro Mechanical Systems (MEMS) has demonstrated powerful capabilities in many fields of engineering and science. MEMS-based commercial products are already in the market, replacing existing technology, or creating new possibilities. This technology is firmly based on a unique manufacturing paradigm, micromachining. Micromachining is a core technology that enables the MEMS and related new approaches in engineering and science. This course will cover the fundamental fabrication and theoretical issues of the micromachining critical in micro/nano systems applications.

  • Introduction:
    • CMOS Process
    • Micro-Electro-Mechanical-Systems(MEMS)
    • Microsciences
  • Theory:
    • Lithography
    • Doping, Ion implantation
    • Silicon oxidation
    • Crystallography
    • Etching
  • Microfabrication:
    • Bulk micromachining
    • Surface micromachining
    • Soft micromachining
  • New trends:
    • Nanotechnology integration
    • Biotechnology integration
    • Optical MEMS
  • Example applications:
    • Microsensors
    • Microfluidics
    • On-chip DNA analysis
    • Analyses of existing MEMS.
  • Hands on demonstration:
    • Cleanroom tour
    • Lithography
    • Wet & dry etching
    • Sample inspection

Related courses

  • ME 381 Introduction to Micro-Electro-Mechanical Systems
  • ME 385 Nanotechnology