Master's and PhD Degrees
MECH_ENG 381: Intro to Micro-Electro-Mechanical Systems

Quarter Offered

None : TTh 3:30-4:50 ; H. Espinosa




mirrorIntroduction to microelectromechanical devices with an emphasis on their manufacturing and mechanical behavior. Material properties, microfabrication technology, mechanical behavior of of microstructures, design, and packaging. Case studies of sensors, wireless communications, fluidic systems, micro engines, and biological devices.

Who Takes It

Undergraduate and graduate students interested in the physics and design of microsensors, size scale in MEMS materials, micro and nanomanipulation, etc. should take this course.

What It's About

MEMS is an emerging technology that is attracting significant attention in the engineering, chemistry and biology communities. The National Science Foundation and National Institutes of Health consider MEMS one of the main research areas of the decade. MEMS were successfully utilized in breakthrough applications, such as accelerometers for air bag deployment in automobiles, and digital mirrors for high-resolution display. Currently, MEMS for cancer cell detection, manipulation of bio-molecules, artificial retina, and neural activity measurements are being developed.



  •     Microfabrication techniques
  •     Thin film material properties (constitutive laws and size effects)
  •     Mechanical behavior of microstructures
  •     Sensing and actuation of mechanical, optical, microfluidic devices
  •     Case studies: accelerometers, RF-switches, micro-engines, digital mirrors, and fluidic systems


Homework will be assigned on a regular basis. There is a mid-term exam and final project.