Courses / DescriptionsMAT_SCI 355: Electronic Materials
Courses
/ Descriptions
Quarter Offered
Fall : MWF 11-11:50 ; WesselsPrerequisites
MAT SCI 316-1 and 351-1 or Consent of InstructorDescription
Topics to be covered include defects, diffusion, ion implantation, epitaxy, thermal oxidation, plasma processing, thin films, semi conductor devices, very-large-scale integration (VLSI) processes and nanoelectronic devices.
Textbook: Electronic Materials Science: For Integrated Circuits in SI and GAAS, J. W. Mayer and S. S. Lau ISBN: 9780023781407