Courses
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Descriptions
MAT_SCI 355: Electronic Materials

Quarter Offered

None ;

Prerequisites

MAT SCI 316-1 and 351-1 or Consent of Instructor

Description

Topics to be covered include defects, diffusion, ion implantation, epitaxy, thermal oxidation, plasma processing, thin films, semi conductor devices, very-large-scale integration (VLSI) processes and nanoelectronic devices.

Textbook: Electronic Materials Science: For Integrated Circuits in SI and GAAS, J. W. Mayer and S. S. Lau ISBN: 9780023781407